Edwards STPH301CV TMS ISO100F
Inlet Vacuum Pump
- Overview
- Comments
The Edwards STPH301CV TMS ISO100F Inlet vacuum pump is an oil-free turbomolecular pump with a magnetically suspended rotor. Field-proven reliability and best-in-class performance provide maximum process flexibility. The pump is approved for use by major OEMs in the semiconductor and magnetics industries.
Specifications:
- Item No.: YT3416001
- Pumping speed (N?/H?) , l/s: 300/200
- Inlet flange: ISO100F
- Output flange: KF40
- Maximum possible outlet pressure, Pa: 660
- Nominal rotation speed, rpm: 48000
- Engine power, kW: 0.6
- Series : STPH301
- Flange type :ISO
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