Burkert Sensors

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Mass Flow Controller for Gases (MFC)
MFC for Gases
Mass flow controller byp. chip ECO
Mass flow controller for heavy-duty
Heavy-duty m ass flow controller
Mass flow controller for gases (MFC) .
For regulating the mass flow of gases over a big flow range. Nominal flow ranges from 0.010 lN/min to 80 lN/min.
Suited for regulating the mass flow of gases over a big flow range.
Suitable for controlling the mass flow of high gas quantities.
Flow Meter with very fast response times. Nominal flow ranges: 0.010 lN/min .. 80 lN/min.
High accuracy and repeatability.
The thermal inline sensor is located directly in the gas stream and therefore achieves very fast response times.
The thermal MEMS sensor is located directly in the gas stream and therefore reaches very fast response times.
Mass flow controller byp. chip IP65
The integrated PI controller ensures outstanding control characteristics of the MFC
Mass Flow Controller for Gases (MFC) .
A direct-acting proportional valve guarantees high response sensitivity.
Nominal flow ranges from 20 lN/min up to 1500 lN/min.
MFC for regulating the mass flow of aggressive gases.
Nominal flow ranges: 20 lN/min ... 1500 lN/min.
Nominal flow ranges: 20 lN/min - 1500 lN/min.
Fieldbus optional, IP65.
Perfect suited for regulating the mass flow of gases over a big flow range.
Nominal flow ranges from 0.010 lN/min to 80 lN/min
Flow ranges - 0.010 lN/min ... 80 lN/min.
MFC with high measuring accuracy and repeatability.
Fast settling times. Protection class IP65.
The integrated PI controller ensures excellent control characteristics of the MFC.
Can optionally be calibrated for two different gases.
Mass flow controller inline heavy-duty