MFM with High accuracy. Very fast response times.
Mass Flow Controller for Gases (MFC) .
TwinPower Rocker-Solenoid Valve with medium separation. 22 mm ultra compact design.
Solenoid valve with medium separation. Isolating diaphragm for high chemical resistance.
Perfect suited for regulating the mass flow of gases over a big flow range.
MFC with high measuring accuracy and repeatability.
Fast settling times. Protection class IP65.
The integrated PI controller ensures excellent control characteristics of the MFC.
Nominal flow ranges from 0.010 lN/min to 80 lN/min
Can optionally be calibrated for two different gases.
MFC for Gases
Mass flow controller byp. chip ECO