The thermal MEMS sensor is located directly in the gas stream and therefore reaches very fast response times.
Nominal flow ranges: 20 lN/min - 1500 lN/min.
A direct-acting proportional valve from B?rkert guarantees a high sensitivity.
Mass Flow Controller for Gases (MFC)
MFM with High accuracy. Very fast response times.
Mass Flow Controller for Gases (MFC) .
TwinPower Rocker-Solenoid Valve with medium separation. 22 mm ultra compact design.
Solenoid valve with medium separation. Isolating diaphragm for high chemical resistance.
Perfect suited for regulating the mass flow of gases over a big flow range.
MFC with high measuring accuracy and repeatability.
Fast settling times. Protection class IP65.
The integrated PI controller ensures excellent control characteristics of the MFC.