The thermal MEMS sensor is located directly in the gas stream and therefore reaches very fast response times.
Flow ranges: 0.010 lN/min … 80 lN/min.
High accuracy and repeatability. Optional: Fieldbus interface.
The thermal MEMS sensor is located directly in the gas stream and therefore reaches very fast response times.
MFC for regulating the mass flow of aggressive gases.
A direct-acting proportional valve from B?rkert guarantees a high sensitivity.
Mass Flow Controller for Gases (MFC)
MFC for Gases
Suitable for measuring the mass flow of gases over a big flow range.
Can optionally be calibrated for two different gases.
Mass flow controller inline heavy-duty
Mass flow controller byp. chip ECO
Suited for regulating the mass flow of gases over a big flow range.
Nominal flow ranges from 0.010 lN/min to 80 lN/min.
Nominal flow ranges: 0.010 lN/min - 80 lN/min.
TwinPower Rocker-Solenoid Valve with medium separation.
Mass flow controller for heavy-duty
For regulating the mass flow of gases over a big flow range. Nominal flow ranges from 0.010 lN/min to 80 lN/min.
Applicable for aggressive gases. High accuracy and repeatability.
MFC especially suited for regulating the mass flow of aggressive gases. Nominal flow ranges: 0.005 lN/min ... 15 lN/min.
Mass Flow Controller for aggressive gases. The measurement is based on the bypass principle.
Mass flow controller byp. chip IP65
The integrated PI controller ensures outstanding control characteristics of the MFC
2/2-way-solenoid Diafragm Valve, servo assisted
Flow ranges: 0.010 lN/min … 80 lN/min.
MFM with High accuracy. Very fast response times.
Heavy-duty m ass flow controller
Mass flow controller for gases (MFC) .
Suitable for controlling the mass flow of high gas quantities.
The thermal inline sensor is located directly in the gas stream and therefore achieves very fast response times.