Burkert Mass Flow Controllers
Applicable for aggressive gases. High accuracy and repeatability.
Mass flow controller for heavy-duty
Nominal flow ranges from 0.010 lN/min to 80 lN/min.
Nominal flow ranges: 0.010 lN/min - 80 lN/min.
Flow ranges: 0.010 lN/min … 80 lN/min.
Heavy-duty m ass flow controller
High accuracy and repeatability. Optional: Fieldbus interface.
The thermal MEMS sensor is located directly in the gas stream and therefore reaches very fast response times.
A direct-acting proportional valve from B?rkert guarantees a high sensitivity.
Suitable for measuring the mass flow of gases over a big flow range.
Mass flow controller for gases (MFC) .
Suitable for controlling the mass flow of high gas quantities.
The thermal inline sensor is located directly in the gas stream and therefore achieves very fast response times.
A direct-acting proportional valve guarantees high response sensitivity.
Nominal flow ranges from 20 lN/min up to 1500 lN/min.
Nominal flow ranges: 20 lN/min ... 1500 lN/min.
Nominal flow ranges: 20 lN/min - 1500 lN/min.
MFC with high measuring accuracy and repeatability.
High accuracy and repeatability.
Fast settling times. Protection class IP65.
MFM with High accuracy. Very fast response times.
Flow Meter with very fast response times. Nominal flow ranges: 0.010 lN/min .. 80 lN/min.
Suitable for measuring the mass flow of gases over a big flow range.
The integrated PI controller ensures excellent control characteristics of the MFC.
Mass Flow Controller for Gases (MFC)
MFC for Gases
Mass flow controller byp. chip ECO
Can optionally be calibrated for two different gases.
The thermal MEMS sensor is located directly in the gas stream and therefore reaches very fast response times.
Mass flow controller inline heavy-duty