Burkert Mass Flow Controllers

Flow ranges: 0.010 lN/min … 80 lN/min.

Suitable for measuring the mass flow of gases over a big flow range.

High accuracy and repeatability. Optional: Fieldbus interface.

The thermal MEMS sensor is located directly in the gas stream and therefore reaches very fast response times.

Nominal flow ranges: 20 lN/min - 1500 lN/min.

A direct-acting proportional valve from B?rkert guarantees a high sensitivity.

Mass Flow Controller for Gases (MFC)

MFM with High accuracy. Very fast response times.

Mass Flow Controller for Gases (MFC) .

Perfect suited for regulating the mass flow of gases over a big flow range.

MFC with high measuring accuracy and repeatability.

Fast settling times. Protection class IP65.

The integrated PI controller ensures excellent control characteristics of the MFC.

Nominal flow ranges from 0.010 lN/min to 80 lN/min

Can optionally be calibrated for two different gases.

MFC for Gases

Mass flow controller byp. chip ECO

Mass flow controller inline heavy-duty

Mass flow controller for heavy-duty

Flow ranges - 0.010 lN/min ... 80 lN/min.

Heavy-duty m ass flow controller

Flow ranges : 0.010 lN/min - 80 lN/min.

Mass flow controller for gases (MFC) .

Suitable for controlling the mass flow of high gas quantities.

Mass Flow Controller for aggressive gases. The measurement is based on the bypass principle.

High accuracy and repeatability.

The thermal inline sensor is located directly in the gas stream and therefore achieves very fast response times.

A direct-acting proportional valve guarantees high response sensitivity.

Nominal flow ranges from 20 lN/min up to 1500 lN/min.

Flow Meter with very fast response times. Nominal flow ranges: 0.010 lN/min .. 80 lN/min.