Burkert Mass Flow Controllers
Nominal flow ranges: 20 lN/min ... 1500 lN/min.
Suited for regulating the mass flow of gases over a big flow range.
Nominal flow ranges from 0.010 lN/min to 80 lN/min.
High accuracy and repeatability. Applicable for aggressive gases.
Nominal flow ranges: 20 lN/min - 1500 lN/min.
Mass flow meter with high accuracy. Especially suited for measuring the mass flow of aggressive gases.
MFC with high measuring accuracy and repeatability.
Fast settling times. Protection class IP65.
Nominal flow ranges: 0.010 lN/min - 80 lN/min.
The integrated PI controller ensures excellent control characteristics of the MFC.
The thermal MEMS sensor is located directly in the gas stream and therefore reaches very fast response times.
Flow ranges: 0.010 lN/min … 80 lN/min.
High accuracy and repeatability. Optional: Fieldbus interface.
The thermal MEMS sensor is located directly in the gas stream and therefore reaches very fast response times.
MFC for regulating the mass flow of aggressive gases.
A direct-acting proportional valve from B?rkert guarantees a high sensitivity.
Mass Flow Controller for Gases (MFC)
MFC for Gases
Suitable for measuring the mass flow of gases over a big flow range.
Can optionally be calibrated for two different gases.
Mass flow controller inline heavy-duty
Mass flow controller byp. chip ECO
Suited for regulating the mass flow of gases over a big flow range.
Nominal flow ranges from 0.010 lN/min to 80 lN/min.
Nominal flow ranges: 0.010 lN/min - 80 lN/min.
Mass flow controller for heavy-duty
For regulating the mass flow of gases over a big flow range. Nominal flow ranges from 0.010 lN/min to 80 lN/min.
Applicable for aggressive gases. High accuracy and repeatability.
MFC especially suited for regulating the mass flow of aggressive gases. Nominal flow ranges: 0.005 lN/min ... 15 lN/min.
Mass Flow Controller for aggressive gases. The measurement is based on the bypass principle.