Burkert Mass Flow Controllers

The thermal inline sensor is located directly in the gas stream and therefore achieves very fast response times.

A direct-acting proportional valve guarantees high response sensitivity.

Nominal flow ranges from 20 lN/min up to 1500 lN/min.

Nominal flow ranges: 20 lN/min ... 1500 lN/min.

Nominal flow ranges: 20 lN/min - 1500 lN/min.

5-foult gas distrubtion manifold

System for measurement gases using the differential pressure principle. Reliable and robust.

Flow Rate Controller. Reduced interfaces. Fit for stand-alone operation.

A direct-acting proportional valve from B?rkert guarantees a high sensitivity.

Mass Flow Controller for Gases (MFC)

MFM with High accuracy. Very fast response times.

MFC with high measuring accuracy and repeatability.

Fast settling times. Protection class IP65.

The integrated PI controller ensures excellent control characteristics of the MFC.

MFC for Gases

High accuracy and repeatability. Applicable for aggressive gases.

Mass flow controller byp. chip ECO

Suited for regulating the mass flow of gases over a big flow range.

Nominal flow ranges from 0.010 lN/min to 80 lN/min.

The integrated PI controller ensures outstanding control characteristics of the MFC

Mass Flow Controller for Gases (MFC) .

Perfect suited for regulating the mass flow of gases over a big flow range.

Nominal flow ranges from 0.010 lN/min to 80 lN/min

Flow ranges - 0.010 lN/min ... 80 lN/min.

Can optionally be calibrated for two different gases.

Flow ranges : 0.010 lN/min - 80 lN/min.

Mass flow controller inline heavy-duty

Mass flow controller for heavy-duty

High accuracy and repeatability.

The thermal MEMS sensor is located directly in the gas stream and therefore reaches very fast response times.