Burkert Sensors
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Mass flow controller for gases (MFC) .
Suitable for controlling the mass flow of high gas quantities.
The thermal inline sensor is located directly in the gas stream and therefore achieves very fast response times.
A direct-acting proportional valve guarantees high response sensitivity.
High accuracy and repeatability. Optional: Fieldbus interface.
Nominal flow ranges from 20 lN/min up to 1500 lN/min.
The thermal MEMS sensor is located directly in the gas stream and therefore reaches very fast response times.
Applicable for aggressive gases. High accuracy and repeatability.
Nominal flow ranges: 20 lN/min ... 1500 lN/min.
A direct-acting proportional valve from B?rkert guarantees a high sensitivity.
Flow Meter with very fast response times. Nominal flow ranges: 0.010 lN/min .. 80 lN/min.
Nominal flow ranges: 20 lN/min - 1500 lN/min.
Mass Flow Controller for Gases (MFC) .
Perfect suited for regulating the mass flow of gases over a big flow range.
MFC with high measuring accuracy and repeatability.
Mass Flow Controller for Gases (MFC)
Fast settling times. Protection class IP65.
The integrated PI controller ensures excellent control characteristics of the MFC.
MFC for Gases
Mass flow controller byp. chip ECO
Suited for regulating the mass flow of gases over a big flow range.
Nominal flow ranges from 0.010 lN/min to 80 lN/min.
Nominal flow ranges: 0.010 lN/min - 80 lN/min.
Flow ranges: 0.010 lN/min … 80 lN/min.
High accuracy and repeatability. Optional: Fieldbus interface.
The thermal MEMS sensor is located directly in the gas stream and therefore reaches very fast response times.
Can optionally be calibrated for two different gases.
Mass flow controller inline heavy-duty
Mass flow controller for heavy-duty
A direct-acting proportional valve from B?rkert guarantees a high sensitivity.