Burkert

Mass flow controller for gases (MFC) .

Suitable for controlling the mass flow of high gas quantities.

The thermal inline sensor is located directly in the gas stream and therefore achieves very fast response times.

A direct-acting proportional valve guarantees high response sensitivity.

Nominal flow ranges from 20 lN/min up to 1500 lN/min.

Solenoid valve with medium separation. 22 mm ultra compact design

Nominal flow ranges: 20 lN/min ... 1500 lN/min.

Nominal flow ranges: 20 lN/min - 1500 lN/min.

MFC with high measuring accuracy and repeatability.

TwinPower Rocker-Solenoid Valve with medium separation. 22 mm ultra compact design.

High accuracy and repeatability.

Twin Power Rocker-Solenoid Valve with separating diaphragm. For highest chemical resistance requirements.

Solenoid valve with separating diaphragm

TwinPower Rocker-Solenoid Valve with separating diaphragm. Ultra compact design

Twin Power Rocker-Solenoid Valve with separating diaphragm. For highest chemical resistance requirements.

Fast settling times. Protection class IP65.

Solenoid valve with medium separation. Isolating diaphragm for high chemical resistance.

MFM with High accuracy. Very fast response times.

Flow Meter with very fast response times. Nominal flow ranges: 0.010 lN/min .. 80 lN/min.

Suitable for measuring the mass flow of gases over a big flow range.

The integrated PI controller ensures excellent control characteristics of the MFC.

Mass Flow Controller for Gases (MFC)

MFC for Gases

Mass flow controller byp. chip ECO

Can optionally be calibrated for two different gases.

The thermal MEMS sensor is located directly in the gas stream and therefore reaches very fast response times.

Mass flow controller inline heavy-duty

TwinPower Rocker-Solenoid Valve with medium separation. 22 mm ultra compact design. Isolating diaphragm for high chemical resistance.

Solenoid valve with medium separation. This valve with the new TwinPoweractuator.

Fieldbus optional, IP65.