Burkert

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Mass flow controller inline heavy-duty
MFC for Gases
Mass flow controller for heavy-duty
Heavy-duty m ass flow controller
Mass flow controller for gases (MFC) .
Suitable for controlling the mass flow of high gas quantities.
Mass flow controller byp. chip IP65
Mass flow controller byp. chip ECO
High accuracy and repeatability. Very fast settling times.
Suited for regulating the mass flow of gases over a big flow range.
The thermal inline sensor is located directly in the gas stream and therefore achieves very fast response times.
Compact Controller for Gases. Nominal flow ranges from 0.010 lN/min to 80 lN/min.
A direct-acting proportional valve guarantees high response sensitivity.
The integrated PI controller ensures outstanding control characteristics of the MFC
Nominal flow ranges from 0.010 lN/min to 80 lN/min.
Nominal flow ranges: 0.010 lN/min - 80 lN/min.
Solenoid valve with medium separation. For control of aggressive fluids and gases.
MFC especially suited for regulating the mass flow of aggressive gases. Nominal flow ranges: 0.005 lN/min ... 15 lN/min.
MFC for regulating the mass flow of aggressive gases.
Nominal flow ranges from 20 lN/min up to 1500 lN/min.
Nominal flow ranges: 20 lN/min ... 1500 lN/min.
Flow ranges: 0.010 lN/min … 80 lN/min.
Solenoid valve with medium separation. 22 mm ultra compact design
Suitable for measuring the mass flow of gases over a big flow range.
High accuracy and repeatability. Optional: Fieldbus interface.
The thermal MEMS sensor is located directly in the gas stream and therefore reaches very fast response times.
Nominal flow ranges: 20 lN/min - 1500 lN/min.
A direct-acting proportional valve from B?rkert guarantees a high sensitivity.
Mass Flow Controller for Gases (MFC)
MFM with High accuracy. Very fast response times.