Burkert
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Heavy-duty m ass flow controller
Flow ranges : 0.010 lN/min - 80 lN/min.
Mass flow controller for gases (MFC) .
Suitable for controlling the mass flow of high gas quantities.
Mass Flow Controller for aggressive gases. The measurement is based on the bypass principle.
High accuracy and repeatability.
The thermal inline sensor is located directly in the gas stream and therefore achieves very fast response times.
A direct-acting proportional valve guarantees high response sensitivity.
Nominal flow ranges from 20 lN/min up to 1500 lN/min.
Flow Meter with very fast response times. Nominal flow ranges: 0.010 lN/min .. 80 lN/min.
Nominal flow ranges: 20 lN/min ... 1500 lN/min.
Suited for regulating the mass flow of gases over a big flow range.
Nominal flow ranges from 0.010 lN/min to 80 lN/min.
High accuracy and repeatability. Applicable for aggressive gases.
Nominal flow ranges: 20 lN/min - 1500 lN/min.
Mass flow meter with high accuracy. Especially suited for measuring the mass flow of aggressive gases.
MFC with high measuring accuracy and repeatability.
Fast settling times. Protection class IP65.
Solenoid valve with medium separation. This valve with the new TwinPoweractuator.
Solenoid valve with medium separation. Robust screw-in connection and 22 mm installation width.
Nominal flow ranges: 0.010 lN/min - 80 lN/min.
The integrated PI controller ensures excellent control characteristics of the MFC.
The thermal MEMS sensor is located directly in the gas stream and therefore reaches very fast response times.
Flow ranges: 0.010 lN/min … 80 lN/min.
High accuracy and repeatability. Optional: Fieldbus interface.
The thermal MEMS sensor is located directly in the gas stream and therefore reaches very fast response times.
MFC for regulating the mass flow of aggressive gases.
A direct-acting proportional valve from B?rkert guarantees a high sensitivity.
Mass Flow Controller for Gases (MFC)
MFC for Gases